JPS6410080U - - Google Patents
Info
- Publication number
- JPS6410080U JPS6410080U JP10177887U JP10177887U JPS6410080U JP S6410080 U JPS6410080 U JP S6410080U JP 10177887 U JP10177887 U JP 10177887U JP 10177887 U JP10177887 U JP 10177887U JP S6410080 U JPS6410080 U JP S6410080U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- phase growth
- shaped framework
- reaction gas
- reaction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 5
- 238000010438 heat treatment Methods 0.000 claims description 3
- 239000012495 reaction gas Substances 0.000 claims 3
- 238000001947 vapour-phase growth Methods 0.000 claims 2
- 238000007599 discharging Methods 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 239000012071 phase Substances 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10177887U JPS6410080U (en]) | 1987-07-03 | 1987-07-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10177887U JPS6410080U (en]) | 1987-07-03 | 1987-07-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6410080U true JPS6410080U (en]) | 1989-01-19 |
Family
ID=31331084
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10177887U Pending JPS6410080U (en]) | 1987-07-03 | 1987-07-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6410080U (en]) |
-
1987
- 1987-07-03 JP JP10177887U patent/JPS6410080U/ja active Pending
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